Synthesis of Ti Aluminides from Ti/Al Laminated Films by Magnetron Sputtering
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چکیده
منابع مشابه
High-power impulse magnetron sputtering of Ti-Si-C thin films from a Ti3SiC2 compound target
We have deposited Ti-Si-C thin films using high-power impulse magnetron sputtering (HIPIMS) from a Ti3SiC2 compound target. The as-deposited films were composite materials with TiC as the main crystalline constituent. X-ray diffraction and photoelectron spectroscopy indicated that they also contained amorphous SiC, and for films deposited on inclined substrates, crystalline Ti5Si3Cx. The film m...
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ژورنال
عنوان ژورنال: Journal of the Japan Institute of Metals and Materials
سال: 1994
ISSN: 0021-4876,1880-6880
DOI: 10.2320/jinstmet1952.58.9_1050